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  • Graduate School of Engineering
  • Division of Precision Science & Technology and Applied Physics
  • Precision Science and Technology Area


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    Functional Materials Area

    Professor YASUTAKE Kiyoshi   Associate Professor KAKIUCHI Hiroaki   Assistant Professor OHMI Hiromasa
    For the progress of advanced technology and basic science, it is indispensable to improve the performance of functional materi-als, and also to create materials with new functions. The aims of our researches are 1) to develop new Earth-conscious technol-ogies for the formation of high-quality functional thin films, 2) to create new functional materials, the surface, interface and bulk properties of which are controlled at atomic level, and 3) to fabri-cate highly-functional thin films and to apply them to actual elec-tronic devices. At present, by using atmospheric-pressure, very high-frequency (VHF) plasma, we focus on developing high-rate, low-temperature and ecoclean film growth technologies and also on studying their applications to the production of solar cells, thin film transistors, thin film sensors, and new functional devices.

    Scientific Hardware Systems Area

    Professor MORITA Mizuho   Associate Professor ARIMA Kenta   Assistant Professor KAWAI Kentaro
    To realize ecological and comfortable information society in the near future, we need highly functional electronic devices capable of controlling even single electron. Bio/environmental sensors based on novel concepts are also required. We have developed various technologies to control semiconductor surfaces and ultrathin insulators on the atomic scale. Based on these technologies, we aim at fabricating novel electronic, optical and microfluidic devices to control electrons, photons and the flow of molecules, respectively.

    Quantum Measurement and Instrumentation Area

    Associate Professor NAKANO Motohiro    Assistant Professor OSHIKANE Yasushi
    QMI lab. has been studied "light" scientifically. Radiation and detection of light is interaction between photon and electron. Therefore we are studying about quantum. Point diffraction wave come out from optical fiber end propagates spherically with sub-nm wavefront distortion. PDI uses the diffraction wave as measurement reference for phase-shifting interferometry at sub-nm accuracy. This figure shows PDI result of absolute surface figure for a spherical concave mirror using digital holography. PDI can measure absolute surface figure for ultra precise mirrors.

    Atomically Controlled Processes Area

    Professor KUWAHARA Yuji   Associate Professor SAITO Akira   Assistant Professor AKAI-KASAYA Megumi
    It has become possible to actually view, touch, and move atoms and molecules in the nanometer world, thanks to advances in science and technology. Today we can assemble atoms and molecules to construct synthetic nanometric structures, which do not exist in nature. In such a microscopic world, we expect to discover various special physical phenomena, states of electrons, electron transport properties, and quantum effects, which are currently unknown.
    Our laboratory is developing new equipment to precisely measure minute physical and chemical quantities of atoms and molecules. Based on the knowledge gained through these measurements, we are developing novel devices that work on new concepts, thereby contributing to the ultimate “product realization” using atoms and molecules. We consider the synthetic creation of novel nano-materials an important innovation frontier for the future of an advanced information society.

    Ultraprecision Machining Area

    Professor YAMAUCHI Kazuto   Associate Professor SANO Yasuhisa   Associate Professor TAKAHASHI Yukio   Assistant Professor MATSUYAMA Satoshi
    In our laboratory, basic and application studies have been carried out, regarding novel surface creation processes such as Elastic Emission Machining (EEM), Plasma Chemical Vaporization Machining (PCVM), and Catalyst Referred Etching (CARE), for flattening advanced material surfaces or fabricating ultraprecise X-ray optics. Since their process mechanisms are on chemical reaction basis, high quality surfaces with no mechanical damage can be produced. For example, targets of applications are X-ray mirror, EUV mirror, SOI wafer, and SiC/GaN substrate. By using fabricated X-ray mirrors, X-ray nanobeam systems and various X-ray microscopes has been successfully developed for various scientific fields such as biology, medical science, nanotechnology and material science.

    Computational Physics Area

    Professor MORIKAWA Yoshitada   Assistant Professor INAGAKI Kohji   Assistant Professor HAMAMOTO Yuji   Assistant Professor KIZAKI Hidetoshi
    To develop highly functionalized materials for various applications such as electronic devices, solar cells, highly efficient fuel cells, organic devices, and so on,it is important to clarify behaviors of electrons and atoms in materals in detail. However, it is often difficult to elucidate such microscopic phenomena experimentally. To this end, we employ first-principles computer simulations and observe electrons and atoms in atomic scale and predict properties of new materials. We develop computer simulation programs based on "Quantum Mechanics" and by using those programs on super computers, we investigate physical and chemical properties of materials and clarify the origins for those properties. Based on these investigations, we propose important factors to desing new efficient materials and contribute to fields related to industry, energy and enviroment which are important in fugure of our society.


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