Laboratories at the School / Graduate School of Engineering

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School of Engineering
- Division of Applied Science
- Division of Mechanical, Materials and Manufacturing Science
  - Department of Mechanical Engineering
  - Department of Materials and Manufacturing Science
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  - Department of Electrical and Electronic Engineering
  - Department of Information and Communication Systems Engineering
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  - Department of Environmental Engineering
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Graduate School of Engineering
- Division of Biotechnology
  - Department of Biotechnology
  - Cooperative Area
- Division of Applied Chemistry
- Division of Precision Engineering and Applied Physics
- Division of Mechanical Engineering
- Division of Materials and Manufacturing Science
- Division of Electrical, Electronic and Infocommunications Engineering
- Division of Sustainable Energy and Environmental Engineering
- Division of Global Architecture
- Department of Management of Industry and Technology
Attached Educational Research Facility
Endowed Chair , Joint Research Chair & Research Alliance Laboratory

School of Engineering
Graduate School of Engineering
Attached Educational Research Facility
Endowed Chair , Joint Research Chair & Research Alliance Laboratory

School of Engineering

- Division of Applied Science
- Division of Mechanical, Materials and Manufacturing Science
  - Department of Mechanical Engineering
  - Department of Materials and Manufacturing Science
- Division of Electronic and Information Engineering
  - Department of Electrical and Electronic Engineering
  - Department of Information and Communication Systems Engineering
- Division of Sustainable Energy and Environmental Engineering
  - Department of Environmental Engineering
  - Department of Nuclear Science and Energy Engineering
- Division of Global Architecture

Graduate School of Engineering

- Division of Biotechnology
  - Department of Biotechnology
  - Cooperative Area
- Division of Applied Chemistry
- Division of Precision Engineering and Applied Physics
- Division of Mechanical Engineering
- Division of Materials and Manufacturing Science
- Division of Electrical, Electronic and Infocommunications Engineering
- Division of Sustainable Energy and Environmental Engineering
- Division of Global Architecture
- Department of Management of Industry and Technology

Attached Educational Research Facility

Endowed Chair , Joint Research Chair & Research Alliance Laboratory

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Research Seeds

Nano Measurement in Production Subarea

Professor TAKAYA Yasuhiro

Associate Professor MIZUTANI Yasuhiro

Assistant Professor UENOHARA Tsutomu

We integrate nano measurement and fabrication in order to establish the highly developped nano production system. Our research are based on the laser applied measurement and fabrication techniques. One of the typical research topics is developping nano-CMM system for nano in-process measurement. Optical radiation force is applied for controlling the sensitive non-contact probe in the integrated nano maching system. This probe is expected to realize better than 10nm resolution during 3-D coordinate measureing.

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