Attached Educational Research Facility > Research Center for Precision Engineering
Assistant Professor OHKUBO Yuji
Assistant Professor SUN Rongyan
Specially Appointed Professor SUGA Tadatomo

Since the dawn of history, civilization has evolved with persistent efforts to develop manufacturing technologies. In this research area, we are creating novel innovative manufacturing technologies to manufacture state-of-the-art optical elements, semiconductor substrates and MEMS · NEMS devices that require nano- and sub-nanometer order accuracy. Under the philosophy that new technology created by us triggers a new industrial revolution in the 21st century and contributes to the further development of mankind, we are immersed in the research and development of “nanoManufacturing process” that having both extreme precision and efficiency.

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