An electron microscope is an important instrument to observe micrometer-, nanometer-, and atomic-scale world that is invisible to the naked eye. We are engaged in research and development of various techniques and technologies that will become the cutting-edge electron microscope measurements. Utilizing various state-of-the-art electron microscopes including the ultra-high voltage electron microscope with the world’s highest accelerating voltage of 3 million volts, we are energetically working on the refinement of three-dimensional measurement methods for ultrafine materials, the development of a novel imaging method without using lenses, and the application of lens-aberration-corrected microscopy to device material measurements.